Explore how SPT’s plasma and thermal systems are used across semiconductor applications—from MEMS to power devices. Discover our solution-driven technologies.
Download our free white paper on PECVD system Cetus to prevent cracking, peeling, and fractures in thick SiO₂ and low-stress SiN for MEMS & devices.
Explore etching solutions from dielectrics to compound semiconductors. Download our free technical paper on SiO2, InP, and SiC etching & tool selection.
Explore Si DRIE Bosch process basics & case studies with AR >60 and etch rates >30 µm/min. Download the free guide for MEMS and TSV process design.
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