Solution

Explore how SPT’s plasma and thermal systems are used across semiconductor applications—from MEMS to power devices. Discover our solution-driven technologies.

Dry Etching for GaN HEMTs: Principles of Low-Damage Processing and Surface Damage Control

Discover how ion bombardment damages GaN HEMTs, degrades 2DEG properties, and explore two key control strategies for low-damage dry etching.

September 8, 2026 SPT Engineering Dev.
Plasma Etching of Compound Semiconductors (GaAs & InP): Selection and Control of Chlorine-Based Gases

Master GaAs & InP plasma etching. Learn how chloride volatility, Cl2/BCl3/Ar/N2 gases, temperature, and damage control impact high-aspect-ratio profiles.

September 8, 2026 SPT Engineering Dev.
Versatile Dielectric and Compound Semiconductor Etching

Explore etching solutions from dielectrics to compound semiconductors. Download our free technical paper on SiO2, InP, and SiC etching & tool selection.

September 8, 2026 SPT Engineering Dev.

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RF Devices

SPT provides low-damage etching and deposition systems optimized for GaN-HEMT processes, supporting RF device integration and performance.

August 12, 2026 SPT Engineering Dev.